Presentation Information
[25p-12H-5]Quantitative of structural in DLC films I: A sp2 ratio compare between
SXES and NEXAFS techniques
〇(D)Thitikorn Chamchuang1, Sarayut Tunmee2, Praphaphon Silawong3, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka University of Technology, 2.Synchrotron Light Research Institute (Public Organization), 3.Rajamangala University of Technology Isan Khonkaen Campus (Thailand))
Keywords:
DLC films,sp2 ratio,SXES
The sp2 ratio is crucial as it provides insight into the hybridization state, structure, and electronic properties of hydrogen-free and hydrogen-containing diamond-like carbon (DLC) films, influencing the properties and application of DLC films. Near-Edge X-ray Absorption Fine Structure (NEXAFS) spectroscopy has been reported to deliver a high-resolution sp2 ratio with specific constraints in hydrogen-containing. To address this limitation, Soft X-ray Emission Spectroscopy (SXES) plays a novel role in the reflective chemical states of DLC films to quantify the sp2 ratio. In this research, SXES is employed to quantify the sp2 ratio in a variety of various DLC films, addressing the limitation associated with NEXAFS in determining the sp2 ratio hydrogen-containing DLC films.