Presentation Information
[25p-61C-9]Machine Learning for Accelerated Diffusion of Impurity in Silicon
〇(M2)Daiki Shimoda1, Kentaro Kutsukake2,3, Toru Ujihara1,3 (1.Grad. School of Eng. Nagoya Univ., 2.AIP RIKEN, 3.IMaSS Nagoya Univ.)
Keywords:
Machine learning,surrogate model