Presentation Information
[10p-N305-8]Enhancement of Ion-Sensing Performance of Light-Addressable Potentiometric Sensors by Parylene Coating
〇Anna Matsumoto1, Yudai Hemmi2, Hiroyuki Matsui2, Ko-ichiro Miyamoto3, Tstsuo Yoshinobu3, Werner Carl Frederik1 (1.Kyoto Inst. Tech., 2.Yamagata Univ., 3.Tohoku Univ.)
Keywords:
chemical sensor,ion sensor,Light-Addressable Potentiometric Sensors
While silicon nitride is commonly used as an insulating film in light-addressable potentiometric sensors (LAPS), it faces challenges with high-temperature deposition and compatibility with ion-selective membranes (ISM). In this study, we applied parylene, a chemically stable material that allows for low-temperature deposition, as the LAPS insulating film. As a result, using parylene significantly improved potassium sensitivity. This is likely due to parylene's excellent adhesion to ISMs and its effect in suppressing pH cross-sensitivity, suggesting its potential to contribute to LAPS performance enhancement and new applications.