Presentation Information

[10p-S101-4]Progress and Outlook of Metrology Informatics

〇Shigetaka Tomiya1 (1.NAIST)

Keywords:

Metrology informatics

Metrology informatics has evolved into a core technology for materials and device R&D by enabling the analysis of increasingly complex and large-scale measurement data, as well as the integration of diverse characterization techniques. This talk will present its recent advances and future prospects.