Presentation Information
[10p-S102-8]Elastic Effect-Driven Suspended and Non-Suspended MoS2-Based Surface Acoustic Wave Skin Gas Sensors
〇(P)Sankar Ganesh Ramaraj1, Ryo Fujioka1, Chen Li1, Daisuke Kiriya1, H Yamahara1, H Tabata1 (1.Univ. of Tokyo)
Keywords:
Surface Acoustic wave,MoS2 Gas sensor,Acetone
Rapid detection of volatile organic compounds (VOCs) emitted from skin ducts serves as a powerful, non-invasive approach for the early diagnosis of various human diseases [1]. The skin releases gas molecules such as acetone, ammonia (NH3), hydrogen sulfide (H2S), and a variety of VOCs, which are recognized as key biomarkers for conditions including diabetes, asthma, renal disorders, halitosis, and lung cancer [2]. Among emerging sensing materials, molybdenum disulfide (MoS2) has attracted considerable attention due to its unique combination of semiconducting behavior, intrinsic piezoelectricity in monolayer form, and high chemical reactivity toward various gas molecules. MoS2 exhibits a moderate Young’s modulus (~270 GPa), offering good mechanical stability while maintaining flexibility suitable for integration with acoustic wave devices. Its piezoelectric properties, which arise in non-centrosymmetric monolayers, make it particularly compatible with surface acoustic wave (SAW) platforms, enhancing wave-matter interactions in sensing configurations [3]. In this work, we present both experimental and simulation studies of a suspended chemical vapor deposition (CVD)-grown MoS2-based SAW sensor operating in Love mode for the real-time detection of acetone gas under ambient conditions.