Presentation Information

[7a-N206-9]Significant Decrease in Electrical Resistance of Palladium thin films by Hydrogenation

〇(M1)Yusuke Ikeda1, Takuya Kawada1, Yuki Shiomi1 (1.Univ. of Tokyo)

Keywords:

hydrogenation,Pd thin film

Pd is a material which can absorb a great amount of hydrogen. It is typically reported that hydrogen absorption induces a few percent increase in the electrical resistance of Pd. In this research, we focused on the film quality of the specimens and deposited Pd thin films by DC sputtering method at several pressures. As a result, the sheet resistance increased immediately after the hydrogen exposure, then reduced to a few hundredth at 7.5 Pa.