[7p-N203-1~14] 4.1 Plasmonics and Nanophotonics

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)English Presentation

[7p-N203-9] Optical Modulation via Atomically Thin Dielectrics in Membrane Metasurface

〇(P)CHIHZONG DENG¹, Kuniaki Konishi², Vincent Tung³, Chun-Wei Chen⁴, Ya-Lun Ho¹ (1.NIMS, 2.School of Sci., The Univ. of Tokyo, 3.School of Eng., The Univ. of Tokyo, 4.National Taiwan Univ.)

Keywords:

Membrane,Metasurface,Bound states in the continuum

We demonstrate an ultrathin freestanding membrane metasurface capable of atomic-level modulation of bound states in the continuum resonances. By eliminating substrate-induced losses, these nanomembranes achieve impressive Q-factors on the order of 10³ to 10⁴, preserving strong optical confinement. Integrating atomic-layer dielectrics via atomic layer deposition (ALD) demonstrated sub-Å precision in light coupling and material characterization, with a single 1.3 Å ALD cycle inducing a 0.3 nm redshift. These membrane metasurfaces, with enhanced surface field sensitivity, are ideal for integrating 2D materials and quantum systems, advancing nanophotonics and providing a powerful tool for sub-Å precision material characterization crucial for advanced semiconductor technologies.