Presentation Information

[8p-N302-9]Advanced mechanical exfoliation method and optical prperty improvement for 2D semiconductors assisted by robotic technology

〇Wataru Idehara1, Shinichiro Matano1, Kazunari Matsuda1 (1.Kyoto Univ)

Keywords:

2D semiconductors,robotic technology

This study revolutionarily advanced the mechanical exfoliation method, which conventionally depended on human experience and manual dexterity, through robotic technology. An automated system combining multiple robotic arms and machine learning was constructed, successfully achieving significant reduction of mechanical stress through precise control at an extremely slow transfer speed (0.01 mm/s). As a result, a remarkable 2.7-fold improvement in photoluminescence intensity was realized for monolayer MoS2 compared to conventional manual fabrication. This achievement was also confirmed for other transition metal dichalcogenides, positioning it as a versatile fabrication methodology applicable to a wide range of layered materials. This method represents a groundbreaking achievement that significantly contributes to the optical property enhancement of 2D semiconductors.