Presentation Information
[8p-N321-11]Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications
〇(P)Guo Chen1, Wen Zhao1, Zhaozong Zhang1, Satoshi KOIZUMI1, Meiyong Liao1 (1.NIMS)
Keywords:
MEMS,Diamond,Graphene
Microelectromechanical systems (MEMS) demand materials that not only possess excellent mechanical strength and thermal stability, but also provide high electrical and optical performance. Single-crystal diamond (SCD) is an ideal material owing to its extreme hardness, chemical inertness, and exceptional thermal conductivity. However, its insulating nature limits its functionality in active sensing. In contrast, graphene—a two-dimensional (2D) material—exhibits outstanding electrical conductivity, carrier mobility, and broadband optical absorption, but relies heavily on substrate support in device applications. By integrating graphene with diamond, a graphene-on-diamond (GOD) heterostructure could offer a platform combining the superior mechanical and thermal properties of diamond with the multifunctionality of graphene. However, to date, MEMS devices based on GOD structures have not yet been successfully fabricated. This all-carbon technology holds great promise for next-generation MEMS sensors that require both mechanical durability and multifunctional responsiveness. In this work, we achieved the in-situ growth of graphene on diamond (100) substrates via rapid thermal annealing (RTA) at 950°C for 2 minutes, as an initial step towards the fabrication of GOD heterostructures for MEMS sensor applications.