[9a-P03-1~6] 6.5 Surface Physics, Vacuum

[9a-P03-6] Research on CAICISS simulation for analysis of ultra-thin surface layers

〇Mitsuhiro Katayama¹, Yoshinobu Otani¹, Tatsuki Wakazaki¹ (1.Graduate School of Engineering, Univ. Osaka)

Keywords:

Co-axial Impact Collision Ion Scattering Spectroscopy (CAICISS),two-body elastic collision,classical mechanical simulation