Presentation Information
[9p-N103-2]Recent Advance in Development of Efficient and Stable Cr/Sc-based Multilayer Mirrors for Applications in the Water Window Soft X-ray Range
〇Evgueni Meltchakov1, Franck Delmotte1 (1.Univ. Paris-Saclay)
Keywords:
multilayer mirror,soft x-ray,water window
Development of efficient normal incidence multilayer mirrors is quite challenging task in the water window domain of soft x-rays, a spectral region between absorption edges of carbon (284 eV) and oxygen (543 eV) with potential applications in biology, microscopy and semiconductor industry. We have shown previously that a high reflectivity of Cr/Sc-based multilayers in the vicinity of the Sc absorption edge (397 eV) can be achieved using conventional magnetron sputtering process with nitridation of Cr layers and implementation of B4C barrier layers at only one interface (Sc-on-Cr). For further optimization of this multilayer system, an original experimental approach was proposed and realized since an accurate reflectivity simulation is not possible because of the lack of reliable optical constants of CrN. The experimental study has confirmed the validity of our strategy and allowed us to produce the Cr/Sc-based multilayers with a world record peak reflectance at near-normal incidence.