Presentation Information

[9p-P11-4]Comparison of hydrophilic treatment of continuous porous dielectrics using surface-launched plasmas in subatmospheric-pressure Ar and atmospheric-pressure He

〇(M1)Masaya Yamamoto1, Tatsuru Shirafuji1, Jun-Seok Oh1 (1.Osaka Metropol. univ.)

Keywords:

plasma

We investigated the hydrophilicity of atmospheric pressure He plasma and quasi-atmospheric pressure Ar plasma. In this presentation, we report on the results of our investigation into the voltage dependence of the water permeability of each plasma. We also compare the costs of each treatment from the perspective of running costs calculated from the gas costs and power consumption required for the treatment, and report on the results.