Presentation Information

[10a-A22-2]Reconstruction area of holographic long-focused beam for laser dicing

〇Nami Kuroo1, Yoshio Hayasaki1 (1.Utsunomiya Univ.)

Keywords:

Beam shaping laser processing,Computer generated hologram,Spatial light modulator

Holographic beam-shaping technology, achieved by displaying a computer-generated hologram
(CGH) on a spatial light modulator (SLM), enables beam shaping along the optical axis direction.
This report describes the three-dimensional reconstruction performance of long-focused beams
for laser drilling and laser dicing.