Presentation Information
[10a-A22-5]Development of a single-shot white-light-interferometric microscope with sub-nanometer-scale precision for precision machining
〇Ryosuke Kawamitsu1, Takao Aoki1,2, Tani Shuntaro3 (1.Waseda Univ., 2.RIKEN RQC, 3.RIKEN RAP)
Keywords:
white light interferometer,laser processing
Laser processing enables precise material removal through non-contact, localized energy delivery. Therefore, research and development is actively underway to establish it as a fabrication technology for high-performance optical components, including micro-optical resonators. For these components, any geometric errors or surface roughness resulting from the processing directly affect optical performanc such as causing scattering losses, making it crucial to quantitatively evaluate the surface topography and optimize processing conditions. White light interferometer (WLI) enables non-contact, wide-field, and high-precision 3D surface profile measurement, and is widely used for evaluating optical elements. WLI reconstructs surface height using interference signals generated by the difference in optical path length between the measurement and reference beams. Ongoing research seeks to optimize data sampling for even higher-precision measurements.However, conventional WLI requires mechanical scanning of the optical path. This not only complicates the system structure but also makes environmental vibrations during scanning a significant factor that degrades measurement accuracy. In this presentation, we report on the development of a single-shot measurement method that acquires surface height information with a single exposure, thereby achieving high-precision profile evaluation.