[10a-A23-1~12] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[10a-A23-9] Intrinsic Step Jamming in Surface Kinetics of the KPZ-like Rough Surfaces and Methods for Avoiding It

〇Noriko Akutsu^1,2, Yoshihiro Kangawa³ (1.Osaka Electro-Com., 2.Kyoto Univ., 3.RIAM Kyushu Univ.)

Keywords:

Surface gradient distribution,KPZ-like rough surface,step bunching

To investigate surface kinetics, we studied kinetic roughening during steady-state growth on crystal surfaces inclined from (001) to (111) using the Monte Carlo method. We report how step-density inhomogeneities arise via a mechanism distinct from previously known step bunching, through morphological changes in surface undulations, and how these inhomogeneities can be avoided.