[10a-E203-1~11] 17.2 Fundamental properties

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-E203-2] afm based thermal expansion field measurement for evaluating hbn heat spreaders

〇(M1)Yuuya Hatano^1,2, Kenji Watanabe¹, Takashi Taniguchi¹, Satoshi Moriyama^1,2, Shuichi Iwakiri¹ (1.NIMS, 2.Tokyo Denki Univ.)

Keywords:

hexagonal boron nitride,atomic force microscope

In two-dimensional (2D) devices, localized hotspots generated by Joule heating are a major cause of reliability degradation. In this study, an atomic force microscopy (AFM)-based measurement method was developed to evaluate the effect of an h-BN heat spreader from the viewpoint of thermal expansion behavior rather than temperature. Thermal expansion distributions within the substrate with and without h-BN were directly measured and visualized to evaluate the heat spreading effect.