Presentation Information
[10a-PA4-10]Evaluation of Rockwell Indentation Damage Behavior of DLC Films Using Raman Five-Peak Deconvolution Analysis
〇Keigo Umebara1, Yoshihisa Osano1,2, Tatsuyuki Nakatani2 (1.Mitsubishi Pencil Co., Ltd., 2.Okayama Univ. of Sci.)
Keywords:
Diamond-like Carbon film,Raman Spectroscopy,Rockwell Indentation
In this study, cracks formed around Rockwell indentations in Diamond-like Carbon (DLC) films were quantitatively analyzed using an image analysis technique, and the relationship between the damage behavior and carbon structure was investigated through five-peak deconvolution analysis of Raman spectra. The results indicate that the crack formation behavior of DLC films induced by substrate deformation can be characterized based on the carbon structural information obtained from the five-peak deconvolution analysis of Raman spectra.