Presentation Information
[10a-PA4-24]Fabrication of Monolithic Integrated Diamond DRAM cells
〇Ryoma Matsuura1, Asahi Okuno1, Yuhei Seki1, Hitoshi Umezawa2,3, Junichi H.Kaneko1,3 (1.Hokkaido Univ., 2.AIST., 3.Ookuma Diamond Device)
Keywords:
diamond,field effect transistor