Presentation Information
[10a-PA4-3]Composition analysis of fluorinated diamond-like carbon (DLC) thin films irradiated with atomic hydrogen
〇Yuichi Haruyama1, Akira Heya2, Koji Sumitomo2, Seigo Ito2 (1.LASTI, Univ. Hyogo, 2.Eng, Univ. Hyogo)
Keywords:
F-DLC,atomic hydrogen irradiation,photoelectron spectroscopy
The effect of atomic hydrogen irradiation on fluorinated diamond-like carbon thin films was investigated by photoelectron spectroscopy. The ratio of F 1s intensity to C 1s intensity (F/C) decreased rapidly up to 30 minutes of irradiation, but thereafter increased slightly with increasing irradiation time, saturating around F/C = 1. This indicates that irradiation of fluorinated diamond-like carbon thin films with atomic hydrogen reduces the fluorine content compared to before irradiation.