[10a-PA4-1~26] 6.2 Carbon-based thin films

[10a-PA4-8] Humidity Effects on QCM Devices Coated with a-C:N Films

〇(M1)Towa Kato¹, Yasushi Ishiguro², Kazuya Kanasugi¹, Kenji Hirakuri¹ (1.Tokyo Denki Univ., 2.National Defense Acad.)

Keywords:

gas sensor