Presentation Information
[10a-PA4-8]Humidity Effects on QCM Devices Coated with a-C:N Films
〇(M1)Towa Kato1, Yasushi Ishiguro2, Kazuya Kanasugi1, Kenji Hirakuri1 (1.Tokyo Denki Univ., 2.National Defense Acad.)
Keywords:
gas sensor
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