Presentation Information
[10a-PA4-9]Analysis of Microscratch Behavior of Diamond-like Carbon Films Using Five-Peak Raman Carbon Structural Descriptors
〇Yoshihisa Osano1,2, Keigo Umebara2, Tatsuyuki Nakatani1 (1.Okayama Univ. of Sci., 2.Mitsubishi Pencil Co., Ltd.)
Keywords:
Diamond-like Carbon film,Raman spectroscopy,Microscratch testing
In this study, the microscratch behavior of diamond-like carbon (DLC) films was evaluated using structural descriptors obtained from Raman five-peak deconvolution analysis. Raman spectra were separated into the N, D, G−, G+, and D′ bands, and the peak position, intensity, full width at half maximum, and area ratio were extracted as structural descriptors. Their relationships with the critical delamination load were examined. The results suggested that the development of sp2 C=C cluster structures contributed to stress relaxation under frictional loading, thereby enhancing the delamination resistance of the films. This interpretation was consistent with Raman imaging results of the scratch tracks and changes in the dynamic coefficient of friction. These findings indicate that Raman five-peak deconvolution analysis provides an effective approach for relating carbon structure to microscratch damage behavior and may support the optimization of DLC film structure and deposition conditions.