Presentation Information
[10a-PB1-29]Photovoltaic Characteristics of Perovskite Solar Cells introduced a Low-Damage Sputtered ITO Interlayer
〇Ryuki Usuda1, Hiroshi Iwata1,2, Nao Saito1, Tsutomu Miyasaka1, Masashi Ikegami1 (1.Toin univ. of Yokohama, 2.Advanced Sputter Tech)
Keywords:
perovskite,low-damage sputter deposition,durability
The incorporation of light-transmitting ITO is highly desired to extend the lifetime and enable tandem configurations of perovskite solar cells (PSCs). However, conventional sputtering processes severely damage underlying layers. In this study, we fabricated n-i-p PSCs with an ITO passivation layer using a low-damage sputtering process. A semi-automatic spin coater with an automatic dispenser was utilized to ensure the smoothness of the perovskite and hole-transport layers. We then evaluated their power conversion efficiencies, aiming to enhance both device durability and process robustness for future mass production.