[10p-A31-1~16] 11.2 Wires, Bulks, Fabrication process, Power applications

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[10p-A31-10] Single Step Deposition of YBa₂Cu₃O₇ Thin Films by Mist CVD Method

〇(M1)Naoya Shibata¹, Ryo Horiuchi¹, Akiyoshi Matsumoto², Yusuke Sogabe¹, Masayoshi Inoue³, Ryo Teranishi⁴, Takumi Ikenoue¹ (1.Kyoto Univ., 2.NIMS, 3.FIT, 4.Kyusyu Univ.)

Keywords:

YBCO,Mist CVD,REBCO

YBa₂Cu₃O₇ (YBCO), with its high critical temperature of 92 K, shows great promise for superconducting wire applications. However, establishing a low-cost, high-productivity fabrication process under atmospheric pressure remains a critical challenge. In this study, we employed the mist chemical vapor deposition (Mist CVD) method and attempted single-step deposition of YBCO thin films by supplying oxygen during the deposition process to promote the thermal decomposition of carbon-containing precursor species. X-ray diffraction (XRD) analysis of the deposited films revealed diffraction peaks corresponding to the YBCO (00l), together with peaks attributed to YBCO (103), BaCO₃ and Y₂O₃. Although secondary phases were observed, the results indicated feasibility of single-step deposition of YBCO thin film.