[10p-A33-1~14] 3.7 Optical measurement, instrumentation, and sensor

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)English Presentation

[10p-A33-5] Multilayer Tomographic Spectroscopy for Complex Refractometry in SD-OCT

〇BILKIS FARJANA^1,2, Shuto Onodera¹, Satoe Murazawa¹, Takahiro Kajiyama¹, Tatsutoshi Shioda¹ (1.Saitama Univ., 2.BAIUST)

Keywords:

Optical Coherence Tomography,Tomographic Spectroscopy,Complex Refractive Index

We develop a tomographic spectroscopy algorithm that measures the internal optical properties of multilayer structures using Spectral-Domain Optical Coherence Tomography (SD-OCT). Standard Kramers-Kronig (KK) analysis often struggles with severe boundary distortions in multilayer samples. To solve this problem, we apply an optimized signal conditioning step before the KK inversion. We tested our approach on a simulated a fused silica layer over a silicon substrate. The results show that our technique enhances the accuracy of complexity refractive index measurements for each layer. This improved technique enables non-destructive, high-precision material characterization for advanced semiconductor manufacturing and represents a substantial advancement for the analysis of complex layered materials.