[10p-E203-1~14] 17.3 Applications

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[10p-E203-9] Evenly dielectrophoretic alignment of CNT using ultra-fine floating potential electrodes and its effect on NO₂ gas sensor

〇Tomoki Mido¹, Masafumi Inaba², Michihiko Nakano³, Takashi Yoshida¹ (1.Kyushu Univ., 2.Kansai Univ., 3.Ritsumeikan Univ.)

Keywords:

carbon nanotube,gas sensor,dielectrophoresis

We have studied an NO₂ gas sensor in which carbon nanotubes (CNTs) are collected via dielectrophoresis. During sensor fabrication, an uneven alignment of the CNTs is a problem. To address this, many ultra-fine floating-potential electrodes have been placed between the voltage-application electrodes. This method improved uniformity; however, the effect of the floating-potential electrodes on sensor performance remains unclear. In this study, we investigated the NO₂ response characteristics of CNT gas sensors fabricated with floating-potential electrodes.