[10p-E311-1~13] 7.2 Applications and technologies of electron beams

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[10p-E311-11] Simulation Analysis of the Curvature Radius Dependence in the Coulomb Effect of Facet Electron Sources

〇Yasunari Sohda¹, Takaya Satomi¹ (1.Univ. of Tsukuba)

Keywords:

Elecrton Beam,Coulomb Effect,Scanning Electron Microscope

We investigated the dependence of the Coulomb effect on the radius of curvature in facet electron sources for scanning electron microscopes. At large radius of curvature, the total current is high due to electron emission near the facet edge, which increases energy width, however, the high extraction voltage allows for a high saturation of reduced brightness. Consequently, the optimal radius of curvature depends on the reduced brightness.