Presentation Information
[10p-N101-11]Shallow NV ensembles created by high-angle ion implantation
〇Kento Sasaki1, Hideyuki Watanabe2, Tokuyuki Teraji3, Takashi Taniguchi3, Kenji Watanabe3, Kensuke Kobayashi1 (1.Univ. Tokyo, 2.AIST, 3.NIMS)
Keywords:
Quantum sensor,Nitrogen vacancy center,Nuclear magnetic resonance
Toward nanoscale nuclear magnetic resonance, we proposed and demonstrated a method for creating shallow NV ensembles by high-angle ion implantation. We achieved a high conversion efficiency of approximately 10% and an effective depth of less than 10 nm, and successfully detected boron nuclear spins in hexagonal boron nitride.
