Presentation Information
[10p-N101-5]Fabrication of heteroepitaxial diamond crystals grown on Ir/sapphire substrates using the epitaxial lateral overgrowth method
〇Yusuke Morita1, Osamu Maida1, Seong-Woo Kim2, Koki Matsumoto1, Shuhei Ichikawa1, Kazunobu Kojima1 (1.The Univ. of Osaka, 2.Orbray Co., Ltd.)
Keywords:
heteroepitaxial diamond
We attempted to improve the crystal quality of (001) diamond crystals grown on Ir/sapphire substrates by epitaxial lateral overgrowth from stripe-patterned nucleation regions. Raman spectroscopy analyses of the as-grown surface and cross-sections perpendicular to the stripe direction revealed improved crystallinity in the lateral overgrowth regions. These results indicate that this growth method is effective for improving the crystal quality of heteroepitaxial diamond crystals.
