Presentation Information
[10p-PA1-8]The Effect of Scanning and Polarization on the Orientation of Laser-Induced Periodic Surface Structures
〇Shigeki Matsuo1, Takaki Ryu1 (1.Shibaura Inst. Tech.)
Keywords:
Laser-induced surface periodic structures,scanning,polarization
Laser-induced surface periodic structures (LIPSSs) were formed on silicon substrate by irradiating with elliptically polarized femtosecond laser pulses while scanning. There are two factors that influence the orientation of the resulting LIPSSs: the ‘scanning direction’ and the ‘direction of the major axis of the elliptical polarization’. When experiments were conducted under conditions where these two factors were in conflict, the influence of polarization became more pronounced as the elliptical polarization approached linear polarization. Additionally, the pulse-to-pulse distance during scanning also had an effect to the results.