Presentation Information
[10p-PA1-9]Single-Shot processing of Gold Nanofilms on a Substrate by Femtosecond Laser
〇Taiyo Sugi1,2, Yuuki Uesugi3, Yuichi Kozawa1 (1.IMRAM, Tohoku Univ., 2.Grad. Sch. of Eng., Tohoku Univ., 3.AIST)
Keywords:
Femtosecond Laser,Nanofilms
To expand the applicability of femtosecond laser microprocessing of thin films, single-shot laser processing was performed on Au thin films formed on SiO2 substrates. By varying the laser fluence, different microstructures were obtained, including through-hole formation and residual Au structures, depending on the processing conditions. In this presentation, the formation conditions and characteristics of these processing features will be discussed based on observations using scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS).