Presentation Information
[10p-PB3-34]Fabrication of 3D magnetic wires using patterning technology over steps
〇(M2)Yuiko Ikawa1, Minoru Sasaki1, Hiroyuki Awano1, Kenji Tanabe1 (1.Toyota Tech. Inst)
Keywords:
magnetic wire
Domain-wall racetrack memory, characterized by high density and low power consumption, has been expected to achieve even higher density through three-dimensional (3D) integration since its inception. However, previous 3D fabrication methods involve complex processes, posing challenges in terms of large-area scaling, integration, and reproducibility. Additionally, conventional 2D patterning technologies suited for large areas are difficult to apply to 3D structures. To address these issues, this study attempts to fabricate 3D magnetic nanowires using a 3D patterning technique and reports the findings.