[10p-S1-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[10p-S1-8] DFTB Parametrization for Evaluation of Size Effect in Mo

〇Takahisa Tanaka¹ (1.Keio Univ.)

Keywords:

interconnect,size effect,density functional tight binding