Presentation Information

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[10p-S5-11]Study on High Sensitivity Thermal Diode Infrared Sensors Using Thin Metal Films

〇Satoi Kobayashi¹, Misaki Hanaoka², Kenji Shintani², Naoki Sono¹ (1.MELCO ITR&D, 2.MELCO ATR&D)

Keywords:

infrared sensor,SOI diode

We fabricated a new pixel structure of a thermal diode infrared sensor using a titanium nitride infrared absorber to improve the thermal sensitivity. The thermal sensitivity of the new pixel structure was improved by approximately 7% compared with the conventional pixel structure in test samples which contained both the new and conventional pixel structures on the same chip. This value is roughly consistent with the calculated results using a Fresnel equation model.

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