[11a-A31-1~13] 6.2 Carbon-based thin films

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[11a-A31-8] Evaluation of physical properties of sulfur-doped carbon nitride thin films

〇Taichi Sakurai¹, Taisei Kasahara¹, Yoshio Hashimoto¹, Noriyuki Urakami¹ (1.Shinshu Univ. Faculty of Eng.)

Keywords:

carbon nitride,sulfer