[11a-C212-1~12] 3.7 Optical measurement, instrumentation, and sensor

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[11a-C212-10] Observation of metal processing surface texture by pupil-segmented polarization microscope

〇Norimasa Tsutsui^1,2, Koumei Okahara², Keisuke Yoshiki¹, Hiroshi Ikenoue¹ (1.D-Future, Research Institute, Kochi Univ. of Tech., 2.Denken Co.,Ltd.)

Keywords:

Polarization by Split Pupil Technology (PSPT),Polarization Mode Converter,Nano Machine Vision

Metal processing surfaces were observed using the developed pupil-segmentation polarization microscope, and the correspondence between image features and temporal changes in the machining process was investigated. The birefringent phase retardation of each segment in a multi-segment ECB liquid-crystal device attached to a coaxial-illumination camera was individually controlled by applied voltages, allowing the pupil-segmentation pattern to be switched and directional sensitivity to be introduced. By employing a pupil-segmentation pattern sensitive to processing marks parallel to the machining direction, temporal variations in surface texture during the machining process were successfully extracted.