Presentation Information
[11a-C212-11]Pattern optimisation of multi-annular pupil-splitting polarising elements using simulatedannealing
〇Keisuke Yoshiki1, Norihisa Yoshimura2, Hiroshi Ikenoue1 (1.D-future, Research Institute, Kochi Univ. of Tech., 2.CCS Inc.)
Keywords:
pupil-splitting polarimetry,patterned wave plate,simulated annealing
This study presents the design optimization of multi-annular half-wave patterns for pupil-splitting polarimetric measurement. A patterned wave plate is placed at the pupil plane behind the objective lens, where surface tilt, microscopic steps, and scattering defects are detected through orthogonally polarized light generated by pupil-position shifts of the reflected beam. Since the arrangement of half-wave zones determines sensitivity, linear range, and maximum signal, the ring radii, widths, number of annuli, and pupil positions were used as design variables. Simulated annealing was applied to search manufacturable LCP wave-plate patterns while evaluating the response to relative pupil displacement. The optimization identified stable candidate structures that appeared from different initial conditions, while some trials remained trapped in local solutions. These results show that numerical search can guide pattern selection and provide a basis for fabricating and experimentally evaluating multi-annular pupil-splitting elements.