Presentation Information
[11a-C212-7]In this method which acquires phase information containing distance information as DC voltages, we propose a three-point phase-imparting circuit that eliminates the mechanical scanning conventionally required for the distance and phase measurements. Using the proposed circuit, we experimentally demonstrated simultaneous measurement of the three phase values required to obtain distance information.
〇Mao Nakamura1, Sota Murakami1, Tatsutoshi Shioda1 (1.Saitama Univ.)
Keywords:
distance measurement,Optical Frequency Comb Synthesizer / Analyzer,one-shot measurement
We developed a dual-heterodyne mixing method using an optical frequency comb synthesizer/analyzer toward the realization of full inspection with micrometer-level accuracy on manufacturing lines. By introducing a three-point phase-imparting circuit, the reference-arm path-length scan that had conventionally been indispensable was eliminated, and one-shot simultaneous measurement of three phase values carrying distance information was demonstrated. This work provides an effective approach toward high-precision and high-speed inline three-dimensional measurement.
