[11a-E203-1~10] 1.6 Ultrasonics

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[11a-E203-10] Evaluation of Bulk Acoustic Properties of ScAlN Thin Films Using UMS Technology

〇Yuji Ohashi¹, Ayaka Hanai², Ayaka Katsumata², Takahiko Yanagitani² (1.Akita Pref. Univ., 2.Waseda Univ.)

Keywords:

Sc doped AlN thin film,SMR-type acoustic wave filters,bulk acoustic wave velocity of thin film

Bulk acoustic properties of Sc_xAl_1-xN thin films were evaluated using a plane-wave ultrasonic material characterization (PW-UMC) system. With the acoustic velocity and thickness of the sapphire substrate assumed to be known, the optimal values for the thin film's thickness, longitudinal velocity, and density were determined by fitting these parameters to the experimental data. Although challenges remain regarding the absolute accuracy of the substrate thickness, the results suggest the high utility of this evaluation method.