[11a-E207-1~7] CS.1 Code-sharing session of 2.3&7.4

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[11a-E207-1] Collision-Induced Dissociation Characteristics of High-eV/atom Gas Cluster Ions

〇Mitsuki Nishida¹, Noriaki Toyoda¹ (1.University of Hyogo)

Keywords:

Gas Cluster Ion beam

To improve the etching rate, gas cluster ion beams (GCIBs) with high energy per atom, specifically those consisting of small clusters, are required. In this study, the dissociation process of Ar-GCIBs upon collision with nitrogen gas was evaluated using the time-of-flight (TOF) method. The results revealed that small clusters with a size of 1000 or less (high eV/atom) undergo significant dissociation upon collision, whereas the intensity of clusters around size 1500 remains almost unchanged.