[11a-E207-1~7] CS.1 Code-sharing session of 2.3&7.4

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[11a-E207-4] Internal Energy Measurement of Secondary Ions Produced by MeV Heavy-Ion Beam

〇Koki Nishisaka¹, Yuri Mizutani¹, Toshio Seki¹ (1.Grad. Sch. Eng., Kyoto Univ.)

Keywords:

SIMS,MeV ion beams,thermometer ions

In secondary ion mass spectrometry (SIMS), the use of heavy ions with MeV-scale acceleration energies as primary ions can reduce the dissociation of sputtered molecular ions. In this study, we calculated the internal energy distribution of secondary ions by MeV-SIMS measurement of the benzylpyridinium ion BnPy⁺, which follows a single dissociation pathway at energies of a few eV. We then analyzed the dependence of the secondary ion energy distribution on the vacuum level in the sample chamber.