Presentation Information
[11a-E207-5]Development of Time-of-Flight Based Ion Scattering Method for Elemental Analysis
〇Satoshi Abo1 (1.Univ. of Osaka)
Keywords:
elemental analysis,ion scattering method
Recent progress in the development of a time-of-flight ion scattering analysis technique using a focused ion beam system will be presented. In addition to conventional time-of-flight (ToF) Rutherford backscattering spectrometry (RBS), a simultaneous measurement system combining ToF-RBS and ToF elastic recoil detection (ERD) is being developed for three-dimensional elemental analysis of samples containing light elements. This presentation will describe the performance evaluation of the simultaneous measurement system and discuss characteristic scattering signals observed under sample-tilting conditions.