Presentation Information
[11a-E215-1]Experimental and Numerical Evaluation of the Detection Depth of XAS-PEEM for Solid–Liquid Interface Analysis
〇Masaya Takeuchi1, Takuo Ohkochi2, Satoru Suzuki2 (1.ORIST, 2.LASTI, Univ. of Hyogo)
Keywords:
PEEM,Solid liquid interface analysis,Silicon nitride
For application to solid–liquid interface analysis, we experimentally and numerically evaluated the detection depth of electron signals in XAS-PEEM. A Cr/SiNx sample was irradiated with 576 eV X-rays, and the sample-voltage dependence of the electron signal was measured. The results showed that the electron intensity decreased significantly at sample voltages of 5 V or lower. This suggests that the signal contributing to PEEM image acquisition is dominated not by the several-hundred-eV Auger electrons generated after X-ray absorption themselves, but by low-energy secondary electrons of several eV or less produced during their transport process.
