Presentation Information
[11a-E310-9]Fabrication and high-power laser irradiation stability evaluation of a large-aperture metalens for laser processing
〇Kazuya Motohashi1, Hidetada Tanaka1, Shotaro Kawano2, Mizuho Matoba2, Haruyuki Sakurai2, Kuniaki Konishi2 (1.Koito Manufacturing Co., Ltd., 2.The Univ. of Tokyo)
Keywords:
metalens,laser processing
Metalenes are expected to be applied to high-power lasers; however, their design and fabrication at centimeter-scale apertures and the irradiation durability of their subwavelength structures remain challenging. In this study, we developed a large-aperture metalens with a diameter of 22 mm and an NA of 0.7, and evaluated its stability after high-power laser irradiation. The metalens was irradiated with 940-nm CW laser at 640 W/cm2 for a cumulative duration of 104 min. As a result, no significant degradation was observed in the focusing efficiency or MTF, demonstrating the potential applicability of large-aperture metalenses to high-power laser systems.