Presentation Information

[11a-N304-3]Resist-Contact-Free Device Fabrication Using an α-Sb2O3 Sacrificial Layer

〇Kaito Kanahashi1, Tomonori Nishimura1, Keiji Ueno2, Kosuke Nagashio1 (1.U. Tokyo, 2.Saitama Univ.)

Keywords:

two-dimensional material,Sb2O3