Presentation Information
[11a-PB3-10]Formation of Pt(111)-Oriented Buffer Layers on Stainless-Steel Substrates for AlN-Based Piezoelectric Vibration Energy Harvesters
〇Takuto Amamiya1, Hiroyuki Oguchi1 (1.Shibaura Tech.)
Keywords:
diffusion barrier layer,piezoelectric thin film,energy harvester
To enhance the output power of AlN piezoelectric energy harvesters, we investigated the formation of Pt(111)-oriented underlayers on SUS304 substrates with high fracture toughness. During high-temperature Pt deposition, an unidentified XRD peak, presumably originating from Ti–Pt interdiffusion, was observed. This peak was suppressed by inserting a TiN diffusion barrier layer, which also improved the crystallinity of the Pt film. However, suppressing orientations other than Pt(111) remains a challenge. Therefore, we are currently working to further improve the Pt(111) orientation through surface planarization of the SUS304 substrate.