[11a-PB3-1~10] 6.1 Ferroelectric thin films

[11a-PB3-4] Size Effects on Phase Formation and Polarization Behavior in HfO2–CeO2 Solid-Solution Thin Films

〇(M1)Sakura Takano¹, Yukie Yokota¹, Hiroshi Uchida¹ (1.Sophia Univ.)

Keywords:

ferroelectric,hafnium oxide,chemical solution deposition