[11p-A31-1~9] 6.2 Carbon-based thin films

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[11p-A31-1] Factors Influencing the Thickness of the Surface Layer in Diamond-like Carbon Films

〇Yuji Muraoka¹, Sho Enomoto², Qiang Yue³, Takayoshi Yokoya¹, Takanori Wakita⁴, Hiroyuki Okazaki⁵ (1.RIIS. Okayama Univ., 2.ELST. Okayama Univ., 3.Henan Univ. of Science and Technology, 4.JASRI/Nano Terasu, 5.QST)

Keywords:

DLC,Surface layer,heat accumulation

We investigated the factors influencing the sp²-rich layers formation on the surface of diamond-like carbon (DLC) films. Our results, based on photoelectron spectroscopy measurements and analysis combining the thermal conduction equation and the Arrhenius law, revealed that even when the film is deposited at room temperature, the temperature rise due to heat accumulation during deposition promotes the formation of the surface layer.