[11p-A31-1~9] 6.2 Carbon-based thin films

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[11p-A31-5] Deposition of DLC films on the inner wall of small-diameter pipes by magnetic field-assisted plasma CVD with moving-magnet

〇(M2)Ryo Sako¹, Hiroki Akasaka¹, Shuohan Wang¹ (1.Science Tokyo)

Keywords:

DLC film,Small-diameter pipe,Plasma CVD

By assist of magnetic field, a diamond-like carbon (DLC) film deposited on the inner wall of a small-diameter pipe by generating plasma inside the pipe in our previous work. On the other hand, the thickness of the film is distributed along the magnetic flux lines. Accordingly, we attempted to form a DLC film by locally generating plasma only in the magnetic application area while moving the magnet on the outside of the pipe, thereby forming a uniform film inside a long cylinder.