[11p-A31-1~9] 6.2 Carbon-based thin films

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[11p-A31-7] Effects of H₂ and N₂ addition to the feed gas during DLC deposition on film structure and liquid classification performance

〇(M2)Hiromichi Moide¹, Hiroki Akasaka², Masami Aono³, Toru Harigai⁴, Yoshiharu Mukouyama¹, Tomoko Abe¹, Kenji Hirakuri¹, Yasuharu Ohgoe¹ (1.Tokyo Denki Univ., 2.Institute of Science Tokyo, 3.Kagoshima Univ., 4.Gifu Univ.)

Keywords:

Amorphous carbon thin film (DLC),Electronic tongue,Liquid classification

This study evaluated the optical properties, electrochemical potential windows, and liquid classification performance of DLC films deposited using CH4 mixed with H2 or N2. N2 addition increased the extinction coefficient, indicating an enhanced contribution from sp2 domains, and N-DLC achieved the highest SVM accuracy of 90% for sake classification. In contrast, H2 addition increased the refractive index. Although H-DLC exhibited smaller current responses, it enabled different liquids, including sake and soy sauce, to be measured within a common current range. These results demonstrate that N-DLC is advantageous for liquid discrimination, whereas H-DLC provides stable current-range operation across different liquid types.