Presentation Information
[11p-E202-6]Effects of Annealing Temperature on Mechanical and Piezoelectric Energy Harvesting Properties of Aerosol-Deposited BaTiO3 Thick Films
〇Yoshihiro Kawakami1 (1.RIEM)
Keywords:
piezoelectric thick film,Vibration energy harvester,annealing
It has been confirmed that BaTiO3 films formed by the aerosol deposition method show a significant improvement in properties on energy harvesting even in as-depo films (without annealing) when a poling electric field above a threshold is applied. We investigated whether properties could be improved even in annealed films by optimizing the poling condition. While the piezoelectric properties showed maximum values in films annealed at 1000°C or higher. The sample annealed at 800°C showed a significant increase in generated energy with increasing applied poling electric field, demonstrating superior properties.